Ohio Administrative Code
Title 1301:7 - Division of State Fire Marshal
Chapter 1301:7-7 - Ohio Fire Code
Section 1301:7-7-27 - Semiconductor fabrication facilities
Universal Citation: OH Admin Code 1301:7-7-27
Current through all regulations passed and filed through September 16, 2024
(A) Section 2701 General
(1)
2701.1 Scope.
Semiconductor fabrication facilities and comparable research
and development areas classified as Group H-5 shall comply with this
rule and the building code as listed in rule
1301:7-7-80
of the Administrative Code. The use, storage and handling of hazardous
materials in Group H-5 shall comply with this rule, other
applicable provisions of this code and the building code as listed in
rule
1301:7-7-80
of the Administrative Code.
(2)
2701.2
Application.
The requirements set forth in
this rule are requirements specific only to Group H-5 and
shall be applied as exceptions or additions to applicable requirements set
forth elsewhere in this code.
(3)
2701.3
Multiple hazards.
Where a material poses
multiple hazards, all hazards shall be addressed in accordance with
paragraph (A)(1)( 5001.1) of rule
1301:7-7-50
of the Administrative Code.
(4)
2701.4
Existing buildings and existing fabrication areas.
Existing buildings and existing fabrication areas shall
comply with this rule, except that transportation and handling
of HPM in corridors and enclosures for stairways and ramps shall be allowed
where in compliance with paragraph (E)(3)(b)(2705.3.2)
of this rule and the building code as listed in rule
1301:7-7-80
of the Administrative Code.
(5)
2701.5
Permits.
Permits shall be required as set
forth in rule
1301:7-7-01
of the Administrative Code.
(B) Section 2702 Definitions
(1)
2702.1 Definitions. The following terms
are_defined in rule
1301:7-7-02 of the
Administrative Code.
"Continuous gas detection system."
"Emergency control station."
"Fabrication area."
"Hazardous production material (HPM)."
"HPM room."
"Pass-through."
"Semiconductor fabrication facility."
"Service corridor."
"Tool."
"Workstation."
(C) Section 2703 General safety provisions
(1)
2703.1
Emergency control station. An emergency control station shall be
provided in accordance with paragraphs (C)(1)(a)(2703.1.1)
to (C)(1)(c)(2703.1.3) of this rule.
(a)
2703.1.1
Location.
The emergency control station
shall be located on the premises at an approved location outside the
fabrication area.
(b)
2703.1.2 Staffing.
Trained personnel shall continuously staff the
emergency control station.
(c)
2703.1.3
Signals.
The emergency control station
shall receive signals from emergency equipment and alarm and detection systems.
Such emergency equipment and alarm and detection systems shall include, but not
be limited to, the following where such equipment or systems are required to be
provided either in this rule or elsewhere in this code:
(i)
Automatic
sprinkler system alarm and monitoring systems.
(ii)
Manual fire
alarm systems.
(iii)
Emergency alarm systems.
(iv)
Continuous gas
detection systems.
(v)
Smoke detection systems.
(vi)
Emergency power
system.
(vii)
Automatic detection and alarm systems for pyrophoric
liquids and Class 3 water-reactive liquids required by
paragraph (E)(2)(c)(iv)(2705.2.3.4) of this
rule.
(viii)
Exhaust ventilation flow alarm devices for pyrophoric
liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems
required by paragraph (E)(2)(c)(iv)(2705.2.3.4) of
this rule.
(2)
2703.2
Systems, equipment and processes.
Systems,
equipment and processes shall be in accordance with paragraphs
(C)(2)(a)(2703.2.1) to (C)(2)(c)(ii)(2703.2.3.2) of
this rule.
(a)
2703.2.1 Application.
Systems, equipment and processes shall include, but not be
limited to, containers, cylinders, tanks, piping, tubing, valves and
fittings.
(b)
2703.2.2 General requirements.
In addition to the requirements in
paragraph (C)(2)(2703.2) of this rule
systems, equipment and processes shall also comply with
paragraph (C)(2)( 5003.2) of rule
1301:7-7-50
of the Administrative Code, other applicable provisions of this code,
the building code and the mechanical code as listed in rule
1301:7-7-80
of the Administrative Code.
(c)
2703.2.3
Additional regulations for HPM supply piping.
In addition to the requirements in
paragraph (C)(2)(2703.2) of this rule, HPM
supply piping and tubing for HPM gases and liquids shall comply with this
paragraph.
(i)
2703.2.3.1 General requirements. The
requirements set forth in paragraph (C)(2)(b)(ii)(5003.2.2.2)
of rule
1301:7-7-50
of the Administrative Code shall apply to supply piping and tubing for
HPM gases and liquids.
(ii)
2703.2.3.2 Health-hazard ranking 3 or 4
HPM. Supply piping and tubing for HPM gases and liquids having a
health-hazard ranking of 3 or 4 shall be welded throughout, except for
connections located within a ventilation enclosure if the material is a gas, or
an approved method of drainage or containment provided for connections if the
material is a liquid.
(3)
2703.3
Construction requirements.
Construction of
semiconductor fabrication facilities shall be in accordance with
paragraphs (C)(3)(a)(2703.3.1) to
(C)(3)(i)(2703.3.9) of this rule.
(a)
2703.3.1
Fabrication areas.
Construction and
location of fabrication areas shall comply with the building code as
listed in rule
1301:7-7-80
of the Administrative Code.
(b)
2703.3.2
Pass-throughs in exit access corridors.
Pass-throughs in exit access corridors shall be constructed
in accordance with the building code as listed in rule
1301:7-7-80
of the Administrative Code.
(c)
2703.3.3
Liquid storage rooms.
Liquid storage rooms
shall comply with rule
1301:7-7-57
of the Administrative Code and the building code as listed in
rule
1301:7-7-80
of the Administrative Code.
(d)
2703.3.4
HPM rooms.
HPM rooms shall comply with the
building code as listed in rule
1301:7-7-80
of the Administrative Code.
(e)
2703.3.5
Gas cabinets.
Gas cabinets shall comply
with paragraph (C)(8)(f)(5003.8.6) of rule
1301:7-7-50
of the Administrative Code.
(f)
2703.3.6
Exhausted enclosures.
Exhausted enclosures
shall comply with paragraph (C)(8)(e)(5003.8.5) of
rule
1301:7-7-50
of the Administrative Code.
(g)
2703.3.7
Gas rooms.
Gas rooms shall comply with
paragraph (C)(8)(d)(5003.8.4) of rule
1301:7-7-50
of the Administrative Code.
(h)
2703.3.8
Service corridors. Service corridors shall comply with
paragraph (E)(3)( 2705.3) of this rule and
the building code as listed in rule
1301:7-7-80
of the Administrative Code.
(i)
2703.3.9
Cabinets containing pyrophoric liquids or water-reactive Class 3
liquids. Cabinets in fabrication areas containing pyrophoric liquids or
Class 3 water-reactive liquids in containers or in amounts greater than 1/2
gallon (2 L) shall comply with paragraph
(E)(2)(c)(iv)(2705.2.3.4) of this
rule.
(4)
2703.4 Emergency plan.
An emergency plan shall be established as set forth in
paragraph (C)(7)(a)(403.7.1) of rule
1301:7-7-04
of the Administrative Code.
(5)
2703.5
Maintenance of equipment, machinery and processes.
Maintenance of equipment, machinery and processes shall
comply with paragraph (C)(2)(f)(5003.2.6) of rule
1301:7-7-50
of the Administrative Code.
(6)
2703.6
Security of areas.
Areas shall be secured
in accordance with paragraph (C)(9)(b)(5003.9.2) of
rule
1301:7-7-50
of the Administrative Code.
(7)
2703.7
Electrical wiring and equipment.
Electrical wiring and equipment in HPM facilities shall
comply with paragraphs (C)(7)(a)(2703.7.1) to
(C)(7)(c)(2703.7.3) of this rule.
(a)
2703.7.1
Fabrication areas.
Electrical wiring and
equipment in fabrication areas shall comply with NFPA 70 as listed in
rule
1301:7-7-80
of the Administrative Code.
(b)
2703.7.2
Workstations.
Electrical equipment and
devices within 5 feet (1524 mm) of workstations in which flammable or
pyrophoric gases or flammable liquids are used shall comply with NFPA 70
as listed in rule
1301:7-7-80
of the Administrative Code for Class I, Division 2 hazardous
locations. Workstations shall not be energized without adequate exhaust
ventilation in accordance with paragraph (C)(14)(2703.14) of this
rule.
Exception: Class I, Division 2 hazardous electrical equipment is not required when the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.
(c)
2703.7.3 Hazardous production material (HPM)
rooms, gas rooms and liquid storage rooms. Electrical wiring and
equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with
NFPA 70 as listed in rule
1301:7-7-80
of the Administrative Code.
(8)
2703.8
Corridors and enclosures for stairways and ramps.
Hazardous materials shall not be used or stored in
corridors or enclosures for stairways and ramps.
(9)
2703.9
Service corridors.
Hazardous materials
shall not be used in an open-system use condition in service
corridors.
(10)
2703.10 Automatic sprinkler system.
An approved automatic sprinkler system shall be
provided in accordance with paragraphs (C)(10)(a)(2703.10.1)
to (C)(10)(e)(2703.10.5) of this rule and
rule
1301:7-7-09
of the Administrative Code.
(a)
2703.10.1
Workstations and tools.
The design of the
sprinkler system in the area shall take into consideration the spray pattern
and the effect on the equipment.
(i)
2703.10.1.1 Combustible workstations. A
sprinkler head shall be installed within each branch exhaust connection or
individual plenums of workstations of combustible construction. The sprinkler
head in the exhaust connection or plenum shall be located not more than 2 feet
(610 mm) from the point of the duct connection or the connection to the plenum.
Where necessary to prevent corrosion, the sprinkler head and connecting piping
in the duct shall be coated with approved or listed corrosion-resistant
materials. The sprinkler head shall be accessible for periodic
inspection.
Exceptions:
1.
Approved
alternative automatic fire-extinguishing systems are allowed. Activation of
such systems shall deactivate the related processing equipment.
2.
Process equipment
which operates at temperatures exceeding 932°F (500°C) and is provided with
automatic shutdown capabilities for hazardous materials.
3.
Exhaust ducts 10
inches (254 mm) or less in diameter from flammable gas storage cabinets that
are part of a workstation.
4.
Ducts listed or approved for use without internal
automatic sprinkler protection.
(ii)
2703.10.1.2 Combustible tools. Where the
horizontal surface of a combustible tool is obstructed from ceiling sprinkler
discharge, automatic sprinkler protection that covers the horizontal surface of
the tool shall be provided.
Exceptions:
1.
An automatic
gaseous fire-extinguishing local surface application system shall be allowed as
an alternative to sprinklers. Gaseous-extinguishing systems shall be actuated
by infrared (IR) or ultraviolet/infrared (UV/IR) optical
detectors.
2.
Tools constructed of materials that are listed as Class
1 or Class 2 in accordance with UL 2360 as listed in rule
1301:7-7-80
of the Administrative Code or approved for use without internal fire
extinguishing system protection.
(b)
2703.10.2
Gas cabinets and exhausted enclosures.
An
approved automatic sprinkler system shall be provided in gas cabinets and
exhausted enclosures containing HPM compressed gases.
Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.
(c)
2703.10.3
Pass-throughs in existing exit access corridors.
Pass-throughs in existing exit access corridors shall
be protected by an approved automatic sprinkler system.
(d)
2703.10.4
Exhaust ducts for HPM.
An approved
automatic sprinkler system shall be provided in exhaust ducts conveying gases,
vapors, fumes, mists or dusts generated from HPM in accordance with this
paragraph and the mechanical code as listed in rule
1301:7-7-80
of the Administrative Code.
(i)
2703.10.4.1
Metallic and noncombustible nonmetallic exhaust ducts. An approved
automatic sprinkler system shall be provided in metallic and noncombustible
nonmetallic exhaust ducts where all of the following conditions apply:
(a)
Where the largest
cross-sectional diameter is equal to or greater than 10 inches (254
mm).
(b)
The ducts are within the building.
(c)
The ducts are
conveying flammable gases, vapors or fumes.
(ii)
2703.10.4.2 Combustible nonmetallic exhaust
ducts. An approved automatic sprinkler system shall be provided in
combustible nonmetallic exhaust ducts where the largest cross-sectional
diameter of the duct is equal to or greater than 10 inches (254 mm).
Exceptions:
1.
Ducts listed or
approved for applications without automatic sprinkler system
protection.
2.
Ducts not more than 12 feet (3658 mm) in length
installed below ceiling level.
(iii)
2703.10.4.3 Exhaust connections and plenums of
combustible workstations. Automatic fire-extinguishing system protection
for exhaust connections and plenums of combustible workstations shall comply
with paragraph (C)(10)(a)(i)(2703.10.1.1) of this
rule.
(iv)
2703.10.4.4 Exhaust duct sprinkler system
requirements. Automatic sprinklers installed in exhaust duct systems
shall be hydraulically designed to provide 0.5 gallons per minute (gpm) ( 1.9
L/min) over an area derived by multiplying the distance between the sprinklers
in a horizontal duct by the width of the duct. Minimum discharge shall be 20
gpm (76 L/min) per sprinkler from the five hydraulically most remote
sprinklers.
(a)
2703.10.4.4.1 Sprinkler head locations.
Automatic sprinklers shall be installed at 12-foot
(3658 mm) intervals in horizontal ducts and at changes in direction. In
vertical runs, automatic sprinklers shall be installed at the top and at
alternate floor levels.
(b)
2703.10.4.4.2 Control valve.
A separate indicating control valve shall be provided
for sprinklers installed in exhaust ducts.
(c)
2703.10.4.4.3 Drainage.
Drainage shall be provided to remove sprinkler water
discharged in exhaust ducts.
(d)
2703.10.4.4.4 Corrosive atmospheres.
Where corrosive atmospheres exist, exhaust duct
sprinklers and pipe fittings shall be manufactured of corrosion-resistant
materials or coated with approved materials.
(e)
2703.10.4.4.5 Maintenance and inspection.
Sprinklers in exhaust ducts shall be accessible for
periodic inspection and maintenance.
(e)
2703.10.5
Sprinkler alarms and supervision. Automatic sprinkler systems shall be
electrically supervised and provided with alarms in accordance with
rule
1301:7-7-09
of the Administrative Code. Automatic sprinkler system alarm and
supervisory signals shall be transmitted to the emergency control
station.
(11)
2703.11 Manual fire alarm system.
A manual fire alarm system shall be installed
throughout buildings containing a Group H-5 occupancy. Activation of the alarm
system shall initiate a local alarm and transmit a signal to the emergency
control station. Manual fire alarm systems shall be designed and installed in
accordance with paragraph (G)(907) of rule
1301:7-7-09
of the Administrative Code.
(12)
2703.12
Emergency alarm system.
Emergency alarm
systems shall be provided in accordance with paragraphs
(C)(12)(a)(2703.12.1) to (C)(12)(c)(2703.12.3) of this
rule, (D)(9)( 5004.9) and (E)(4)(d)(5005.4.4) of rule
1301:7-7-50
of the Administrative Code. The maximum allowable quantity per control
area provisions of paragraph (D)(1)( 5004.1) of rule
1301:7-7-50
of the Administrative Code shall not apply to emergency alarm systems
required for HPM.
(a)
2703.12.1 Where required.
Emergency alarm systems shall be provided in the areas
indicated in paragraphs (C)(12)(a)(i)(2703.12.1.1)
to (C)(12)(a)(iii)(2703.12.1.3) of this
rule.
(i)
2703.12.1.1 Service corridors. An approved
emergency alarm system shall be provided in service corridors, with not less
than one alarm device in the service corridor.
(ii)
2703.12.1.2 Corridors and interior exit stairways and
ramps. Emergency alarms for corridors, interior exit stairways and ramps
and exit passageways shall comply with paragraph
(E)(4)(d)(5005.4.4) of rule
1301:7-7-50
of the Administrative Code.
(iii)
2703.12.1.3 Liquid storage rooms, HPM rooms and gas
rooms. Emergency alarms for liquid storage rooms, HPM rooms and gas
rooms shall comply with paragraph (D)(9)( 5004.9) of
rule
1301:7-7-50
of the Administrative Code.
(b)
2703.12.2
Alarm-initiating devices.
An approved
emergency telephone system, local alarm manual pull stations, or other approved
alarm-initiating devices are allowed to be used as emergency alarm-initiating
devices.
(c)
2703.12.3 Alarm signals.
Activation of the emergency alarm system shall sound a
local alarm and transmit a signal to the emergency control
station.
(13)
2703.13 Continuous gas detection
systems.
A continuous gas detection system
shall be provided for HPM gases where the physiological warning threshold level
of the gas is at a higher level than the accepted permissible exposure limit
(PEL) for the gas and for flammable gases in accordance with
paragraphs (C)(13)(a)(2703.13.1) to
(C)(13)(b)(ii)(2703.13.2.2) of this rule.
(a)
2703.13.1
Where required. A continuous gas detection system shall be provided in
the areas identified in paragraphs (C)(13)(a)(i)(2703.13.1.1)
to (C)(13)(a)(iv)(2703.13.1.4) of this
rule.
(i)
2703.13.1.1 Fabrication areas. A
continuous gas detection system shall be provided in fabrication areas where
gas is used in the fabrication area.
(ii)
2703.13.1.2 HPM rooms. A continuous gas
detection system shall be provided in HPM rooms where gas is used in the
room.
(iii)
2703.13.1.3 Gas cabinets, exhausted enclosures
and gas rooms. A continuous gas detection system shall be provided in
gas cabinets and exhausted enclosures. A continuous gas detection system shall
be provided in gas rooms where gases are not located in gas cabinets or
exhausted enclosures.
(iv)
2703.13.1.4 Corridors. Where gases are
transported in piping placed within the space defined by the walls of a
corridor and the floor or roof above the corridor, a continuous gas detection
system shall be provided where piping is located and in the corridor.
Exception: A continuous gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.
(b)
2703.13.2 Gas detection system operation.
The continuous gas detection system shall be capable of monitoring the
room, area or equipment in which the gas is located at or below all the
following gas concentrations:
1.
Immediately dangerous to life and health (IDLH) values
where the monitoring point is within an exhausted enclosure, ventilated
enclosure or gas cabinet.
2.
Permissible exposure limit (PEL) levels where the
monitoring point is in an area outside an exhausted enclosure, ventilated
enclosure or gas cabinet.
3.
For flammable gases, the monitoring detection threshold
level shall be vapor concentrations in excess of 25 per cent
of the lower flammable limit (LFL) where the monitoring is within or outside an
exhausted enclosure, ventilated enclosure or gas cabinet.
4.
Except as noted in
this paragraph, monitoring for highly toxic and toxic gases
shall also comply with rule
1301:7-7-60
of the Administrative Code.
(i)
2703.13.2.1
Alarms. The gas detection system shall initiate a local alarm and
transmit a signal to the emergency control station when a short-term hazard
condition is detected. The alarm shall be both visual and audible and shall
provide warning both inside and outside the area where the gas is detected. The
audible alarm shall be distinct from all other alarms.
(ii)
2703.13.2.2 Shut off of gas supply. The gas
detection system shall automatically close the shutoff valve at the source on
gas supply piping and tubing related to the system being monitored for which
gas is detected when a short-term hazard condition is detected. Automatic
closure of shutoff valves shall comply with the following:
(a)
Where the
gas-detection sampling point initiating the gas detection system alarm is
within a gas cabinet or exhausted enclosure, the shutoff valve in the gas
cabinet or exhausted enclosure for the specific gas detected shall
automatically close.
(b)
Where the gas-detection sampling point initiating the
gas detection system alarm is within a room and compressed gas containers are
not in gas cabinets or exhausted enclosure, the shutoff valves on all gas lines
for the specific gas detected shall automatically close.
(c)
Where the
gas-detection sampling point initiating the gas detection system alarm is
within a piping distribution manifold enclosure, the shutoff valve supplying
the manifold for the compressed gas container of the specific gas detected
shall automatically close.
Exception: Where the gas-detection sampling point initiating the gas detection system alarm is at the use location or within a gas valve enclosure of a branch line downstream of a piping distribution manifold, the shutoff valve for the branch line located in the piping distribution manifold enclosure shall automatically close.
(14)
2703.14 Exhaust ventilation
systems for HPM. Exhaust ventilation systems and materials for exhaust
ducts utilized for the exhaust of HPM shall comply with
paragraphs(C)(14)(a)(2703.14.1) to
(C)(14)(c)(2703.14.3) of this rule, other applicable
provisions of this code, the building code and the
mechanical code as listed in rule
1301:7-7-80
of the Administrative Code.
(a)
2703.14.1
Where required.
Exhaust ventilation
systems shall be provided in the following locations in accordance with the
requirements of this paragraph and the building code
as listed in rule
1301:7-7-80
of the Administrative Code:
(i)
Fabrication
areas: Exhaust ventilation for fabrication areas shall comply with the
building code as listed in rule
1301:7-7-80
of the Administrative Code. The fire code official is authorized to
require additional manual control switches.
(ii)
Workstations: A
ventilation system shall be provided to capture and exhaust gases, fumes and
vapors at workstations.
(iii)
Liquid storage rooms: Exhaust ventilation for liquid
storage rooms shall comply with paragraph (D)(3)(a)(5004.3.1)
of rule
1301:7-7-50
of the Administrative Code and the building code as listed in
rule
1301:7-7-80
of the Administrative Code.
(iv)
HPM rooms:
Exhaust ventilation for HPM rooms shall comply with paragraph
(D)(3)(a)(5004.3.1) of rule
1301:7-7-50
of the Administrative Code and the building code as listed in
rule
1301:7-7-80
of the Administrative Code.
(v)
Gas cabinets:
Exhaust ventilation for gas cabinets shall comply with
paragraph (C)(8)(f)(ii)(5003.8.6.2) of rule
1301:7-7-50
of the Administrative Code. The gas cabinet ventilation system is
allowed to connect to a workstation ventilation system. Exhaust ventilation for
gas cabinets containing highly toxic or toxic gases shall also comply with
rule
1301:7-7-60
of the Administrative Code.
(vi)
Exhausted
enclosures: Exhausted ventilation for exhausted enclosures shall comply with
paragraph (C)(8)(e)(ii)(5003.8.5.2) of rule
1301:7-7-50
of the Administrative Code. Exhaust ventilation for exhausted
enclosures containing highly toxic or toxic gases shall also comply with
rule
1301:7-7-60
of the Administrative Code.
(vii)
Gas rooms:
Exhaust ventilation for gas rooms shall comply with paragraph
(C)(8)(d)(ii)(5003.8.4.2) of rule
1301:7-7-50
of the Administrative Code. Exhaust ventilation for gas rooms
containing highly toxic or toxic gases shall also comply with rule
1301:7-7-60
of the Administrative Code.
(viii)
Cabinets
containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust
ventilation for cabinets in fabrication areas containing pyrophoric liquids or
Class 3 water-reactive liquids shall be as required in
paragraph (E)(2)(c)(iv)(2705.2.3.4) of this
rule.
(b)
2703.14.2 Penetrations.
Exhaust ducts penetrating fire barriers constructed in
accordance with section 707 of the building code as listed in rule
1301:7-7-80
of the Administrative Code or horizontal assemblies constructed in
accordance with section 711 of the building code as listed in rule
1301:7-7-80
of the Administrative Code shall be contained in a shaft of equivalent
fire-resistance-rated construction. Exhaust ducts shall not penetrate fire
walls. Fire dampers shall not be installed in exhaust ducts.
(c)
2703.14.3
Treatment systems.
Treatment systems for
highly toxic and toxic gases shall comply with rule
1301:7-7-60
of the Administrative Code.
(15)
2703.15
Emergency power system.
An emergency power
system shall be provided in Group H-5 occupancies in accordance with
paragraph (D)(604) of rule
1301:7-7-06
of the Administrative Code. The emergency power system shall supply
power automatically to the electrical systems specified in
paragraph (C)(15)(a)(2703.15.1) of this rule
when the normal supply system is interrupted.
(a)
2703.15.1
Required electrical systems.
Emergency
power shall be provided for electrically operated equipment and connected
control circuits for the following systems:
(i)
HPM exhaust
ventilation systems.
(ii)
HPM gas cabinet ventilation systems.
(iii)
HPM exhausted
enclosure ventilation systems.
(iv)
HPM gas room
ventilation systems.
(v)
HPM gas detection systems.
(vi)
Emergency alarm
systems.
(vii)
Manual fire alarm systems.
(viii)
Automatic
sprinkler system monitoring and alarm systems.
(ix)
Automatic alarm
and detection systems for pyrophoric liquids and Class 3 water-reactive liquids
required in paragraph (E)(2)(c)(iv)(2705.2.3.4) of
this rule.
(x)
Flow alarm switches for pyrophoric liquids and Class 3
water-reactive liquids cabinet exhaust ventilation systems required in
paragraph (E)(2)(c)(iv)(2705.2.3.4) of this
rule.
(xi)
Electrically operated systems required elsewhere in
this code or in the building code as listed in rule
1301:7-7-80
of the Administrative Code applicable to the use, storage or handling
of HPM.
(b)
2703.15.2 Exhaust ventilation
systems.
Exhaust ventilation systems are
allowed to be designed to operate at not less than one-half the normal fan
speed on the emergency power system where it is demonstrated that the level of
exhaust will maintain a safe atmosphere.
(16)
2703.16
Sub-atmospheric pressure gas systems.
Sub-atmospheric pressure gas systems (SAGS) shall be in
accordance with NFPA 318 as listed in rule
1301:7-7-80
of the Administrative Code.
(D) Section 2704 Storage
(1)
2704.1 General.
Storage
of hazardous materials shall comply with paragraph (C)(2703)
of this rule and this paragraph and other
applicable provisions of this code.
(2)
2704.2
Fabrication areas.
Hazardous materials
storage and the maximum quantities of hazardous materials in use and storage
allowed in fabrication areas shall be in accordance with
paragraphs (D)(2)(a)(2704.2.1) to
(D)(2)(b)(i)(2704.2.2.1) of this rule.
(a)
2704.2.1
Location of HPM storage in fabrication areas. Storage of HPM in
fabrication areas shall be within approved or listed storage cabinets, gas
cabinets, exhausted enclosures or within a workstation as follows:
(i)
Flammable and
combustible liquid storage cabinets shall comply with
paragraph (D)(3)(b)(5704.3.2) of rule
1301:7-7-57
of the Administrative Code.
(ii)
Hazardous
materials storage cabinets shall comply with paragraph
(C)(8)(g)(5003.8.7) of rule
1301:7-7-50
of the Administrative Code.
(iii)
Gas cabinets
shall comply with paragraph (C)(8)(f)(5003.8.6) of
rule
1301:7-7-50
of the Administrative Code. Gas cabinets for highly toxic or toxic
gases shall also comply with paragraph (D)(1)(b)(6004.1.2)
of rule
1301:7-7-60
of the Administrative Code.
(iv)
Exhausted
enclosures shall comply with paragraph (C)(8)(e)(5003.8.5)
of rule
1301:7-7-50
of the Administrative Code. Exhausted enclosures for highly toxic or
toxic gases shall also comply with paragraph
(D)(1)(c)(6004.1.3) of rule
1301:7-7-60
of the Administrative Code.
(v)
Workstations
shall comply with paragraph (E)(2)(c)(2705.2.3) of
this rule.
(b)
2704.2.2
Maximum aggregate quantities in fabrication areas. The aggregate
quantities of hazardous materials stored and used in a single fabrication area
shall be limited as specified in this paragraph.
Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by paragraph (C)(1)(a)(5003.1.1) of rule 1301:7-7-50 and paragraphs (D)(3)(d)(5704.3.4) and (D)(3)(e)(5704.3.5) of rule 1301:7-7-57 of the Administrative Code.
(i)
2704.2.2.1
Storage and use in fabrication areas. The maximum quantities of
hazardous materials stored or used in a single fabrication area shall not
exceed the quantities set forth in Table 2704.2.2.1 of this
rule.
Table 2704.2.2.1
Quantity limits for hazardous materials in a single fabrication area in Group H-5a
|
Hazard category |
Solids (pounds/square foot) |
Liquids (gallons/square foot) |
Gas (cubic foot @ NTP/square foot) |
|
Physical-hazard materials |
|||
|
Combustible dust |
Note b |
Not applicable |
Not applicable |
|
Combustible fiber Loose Baled |
Note b Notes b and c |
Not applicable |
Not applicable |
|
Combustible liquid Class II Class IIIA Class IIIB Combination Class I, II and IIIA |
Not applicable |
0.01 0.02 Not limited 0.04 |
Not applicable |
|
Cryogenic gas Flammable Oxidizing |
Not applicable |
Not applicable |
Note d 1.25 |
|
Explosives |
Note b |
Note b |
Note b |
|
Flammable gas Gaseous Liquefied |
Not applicable |
Not applicable |
Note d Note d |
|
Flammable liquid Class IA Class IB Class IC Combination Class IA, IB and IC Combination Class I, II and IIIA |
Not applicable |
0.0025 0.025 0.025 0.025 0.04 |
Not applicable |
|
Flammable solid |
0.001 |
Not applicable |
Not applicable |
|
Organic peroxide Unclassified detonable Class I Class II Class III Class IV Class V |
Note b Note b 0.025 0.1 Not limited Not limited |
Not applicable |
Not applicable |
|
Oxidizing gas Gaseous Liquefied Combination of gaseous and liquefied |
Not applicable |
Not applicable |
1.25 1.25 1.25 |
|
Oxidizer Class 4 Class 3 Class 2 Class 1 Combination oxidizer class 1, 2, 3 |
Note b 0.003 0.003 0.003 0.003 |
Note b 0.03 0.03 0.03 0.03 |
Not applicable |
|
Pyrophoric |
0.01 |
0.00125 |
Notes d and e |
|
Unstable reactive Class 4 Class 3 Class 2 Class 1 |
Note b 0.025 0.1 Not limited |
Note b 0.0025 0.01 Not limited |
Note b Note b Note b Not limited |
|
Water reactive Class 3 Class 2 Class 1 |
Note b 0.25 Not limited |
0.00125 0.025 Not limited |
Not applicable |
|
Health-hazard materials |
|||
|
Corrosives |
Not limited |
Not limited |
Not limited |
|
Highly toxics |
Not limited |
Not limited |
Note d |
|
Toxics |
Not limited |
Not limited |
Note d |
For SI: 1 pound per square foot = 4.882 kg/m2, 1 gallon per square foot = 40.7 L/m2, 1 cubic foot @ NTP/square foot = 0.305 m3@ NTP/m2, 1 cubic foot = 0.02832 m3.
a.
Hazardous
materials within piping shall not be included in the calculated
quantities.
b.
Quantity of hazardous materials in a single fabrication
area shall not exceed the maximum allowable quantities per control area in
Tables 5003.1.1(1) and 5003.1.1(2) of rule
1301:7-7-50
of the Administrative Code.
c.
Densely packed baled cotton that complies
with the packing requirements of ISO 8115 as listed in rule
1301:7-7-80
of the Administrative Code shall not be included in this material
class.
d.
The aggregate quantity of flammable, pyrophoric, toxic
and highly toxic gases shall not exceed 9,000 cubic feet at
NTP.
e.
The aggregate quantity of pyrophoric gases in the
building shall not exceed the amounts set forth in Table 5003.8.2 of
rule
1301:7-7-50
of the Administrative Code.
(3)
2704.3 Indoor storage outside of fabrication
areas. The indoor storage of hazardous materials outside of fabrication
areas shall be in accordance with paragraphs
(D)(3)(a)(2704.3.1) to (D)(3)(c)(2704.3.3) of this
rule.
(a)
2704.3.1 HPM storage. The indoor storage
of HPM in quantities greater than those listed in paragraph
(C)(1)(a)(5003.1.1) of rule
1301:7-7-50
of the Administrative Code and paragraph
(D)(3)(d)(5704.3.4) of rule
1301:7-7-57
of the Administrative Code shall be in a room complying with the
requirements of the building code as listed in rule
1301:7-7-80
of the Administrative Code and this code for a liquid storage room,
HPM room or gas room as appropriate for the materials stored.
(b)
2704.3.2
Other hazardous materials storage.
The
indoor storage of other hazardous materials shall comply with
paragraphs (A)(5001), (C)(5003) and (D)(5004) of rule
1301:7-7-50
of the Administrative Code and other applicable provisions of this
code.
(c)
2704.3.3 Separation of incompatible hazardous
materials.
Incompatible hazardous
materials in storage shall be separated from each other in accordance with
paragraph (C)(9)(viii)(5003.9.8) of rule
1301:7-7-50
of the Administrative Code.
(E) Section 2705 Use and handling
(1)
2705.1 General.
The use and handling of hazardous materials shall
comply with this paragraph, paragraph (C)(2703) of
this rule and other applicable provisions of this
code.
(2)
2705.2 Fabrication areas.
The use of hazardous materials in fabrication areas
shall be in accordance with paragraphs (E)(2)(a)(2705.2.1)
to (E)(2)(c)(iv)(2705.2.3.4) of this
rule.
(a)
2705.2.1 Location of HPM in use in fabrication
areas.
Hazardous production materials in
use in fabrication areas shall be within approved or listed gas cabinets,
exhausted enclosures or a workstation.
(b)
2705.2.2
Maximum aggregate quantities in fabrication areas.
The aggregate quantities of hazardous materials in a
single fabrication area shall comply with paragraph
(D)(2)(b)(2704.2.2) of this rule, and Table 2704.2.2.1
of this rule. The quantity of HPM in use at a workstation
shall not exceed the quantities listed in Table 2705.2.2 of this
rule.
Table 2705.2.2
Maximum quantities of HPM at a workstationd
|
HPM classification |
State |
Maximum quantity |
|
Flammable, highly toxic, pyrophoric and toxic combined |
Gas |
Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet |
|
Flammable |
Liquid Solid |
15 gallonsa,b 5 poundsa,b |
|
Corrosive |
Gas Liquid Solid |
Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-Open System: 25 gallonsb Use-Closed System: 150 gallonsb,e 20 poundsa,b |
|
Highly toxic |
Liquid Solid |
15 gallonsa 5 poundsa |
|
Oxidizer |
Gas Liquid Solid |
Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-open system:12 gallonsb Use-closed system: 60 gallonsb 20 poundsa,b |
|
Pyrophoric |
Liquid Solid |
0.5 gallonc,f 4.4 poundsc,f |
|
Toxic |
Liquid Solid |
Use-open system: 15 gallonsb Use-closed system: 60 gallonsb 5 poundsa,b |
|
Unstable reactive Class 3 |
Liquid Solid |
0.5 gallona,b 5 poundsa,b |
|
Water reactive Class 3 |
Liquid Solid |
0.5 gallonc,f See Table 2704.2.2.1 of this rule |
For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L.
a.
Maximum allowable quantities shall be increased 100
per cent for closed system operations. Where note b also
applies, the increase for both notes shall be allowed.
b.
Quantities shall
be allowed to be increased 100 per cent where workstations are
internally protected with an approved automatic fire-extinguishing or
suppression system complying with rule
1301:7-7-09
of the Administrative Code. Where note a also applies, the increase
for both notes shall be allowed. Where note e also applies, the maximum allowed
for both notes b and e shall not exceed 100 per
cent.
c.
Allowed only in workstations that are internally
protected with an approved automatic fire-extinguishing or fire protection
system complying with rule
1301:7-7-09
of the Administrative Code and compatible with the reactivity of
materials in use at the workstation.
d.
The quantity
limits apply only to materials classified as HPM.
e.
Quantities shall
be allowed to be increased 100 per cent for nonflammable,
noncombustible corrosive liquids where the materials of construction for
workstations are listed or approved for use without internal fire extinguishing
or suppression system protection. When Note b also applies, the maximum
increase allowed for both Notes and e shall not exceed 100 per
cent.
f. A maximum quantity of 5.3 gallons of liquids and 44 pounds
of total liquids and solids shall be allowed at a workstation where conditions
are in accordance with paragraph (E)(2)(c)(iv)(2705.2.3.4)
of this rule.
(c)
2705.2.3
Workstations. Workstations in fabrication areas shall be in accordance
with paragraphs (E)(2)(c)(i)(2705.2.3.1) to
(E)(2)(c)(iv)(2705.2.3.4) of this rule.
(i)
2705.2.3.1
Construction. Workstations in fabrication areas shall be constructed of
materials compatible with the materials used and stored at the workstation. The
portion of the workstation that serves as a cabinet for HPM gases, Class I
flammable liquids or Class II or Class IIIA combustible liquids shall be
noncombustible and, if of metal, shall be not less than 0.0478 -inch (18 gage)
( 1.2 mm) steel.
(ii)
2705.2.3.2 Protection of vessels. Vessels
containing hazardous materials located in or connected to a workstation shall
be protected as follows:
(a)
HPM: Vessels containing HPM shall be protected from
physical damage and shall not project from the workstation.
(b)
Hazardous
cryogenic fluids, gases and liquids: Hazardous cryogenic fluid, gas and liquid
vessels located within a workstation shall be protected from seismic forces in
an approved manner in accordance with the building code as listed in
rule
1301:7-7-80
of the Administrative Code.
(c)
Compressed gases:
Protection for compressed gas vessels shall also comply with
paragraph (C)(5)( 5303.5) of rule
1301:7-7-53 of
the Administrative Code.
(d)
Cryogenic fluids:
Protection for cryogenic fluid vessels shall also comply with
paragraph (C)(5)( 5503.5) of rule
1301:7-7-55 of
the Administrative Code.
(iii)
2705.2.3.3 Drainage and containment for HPM
liquids. Each workstation utilizing HPM liquids shall have all of the
following:
(a)
Drainage piping systems connected to a compatible system for
disposition of such liquids.
(b)
The work surface
provided with a slope or other means for directing spilled materials to the
containment or drainage system.
(c)
An approved means
of containing or directing spilled or leaked liquids to the drainage
system.
(iv)
2705.2.3.4 Pyrophoric solids, liquids and Class 3
water-reactive liquids. Pyrophoric liquids and Class 3 water-reactive
liquids in containers greater than 0.5 -gallon (2 L) but not exceeding 5.3
-gallon (20 L) capacity and pyrophoric solids in containers greater than 4.4
pounds (2 kg) but not exceeding 44 pounds (20 kg) shall be allowed at
workstations where located inside cabinets and the following conditions are
met:
(a)
Maximum amount per cabinet: The maximum amount per cabinet
shall be limited to 5.3 gallons (20 L) of liquids and 44 pounds (20 kg) of
total liquids and solids.
(b)
Cabinet construction: Cabinets shall be constructed in
accordance with the following:
(i)
Cabinets shall be constructed of not less than 0.097
-inch ( 2.5 mm) (12 gage) steel.
(ii)
Cabinets shall
be permitted to have self-closing limited access ports or noncombustible
windows that provide access to equipment controls.
(iii)
Cabinets shall
be provided with self- or manual-closing doors. Manual-closing doors shall be
equipped with a door switch that will initiate local audible and visual alarms
when the door is in the open position.
(c)
Cabinet exhaust
ventilation system: An exhaust ventilation system shall be provided for
cabinets and shall comply with the following:
(i)
The system shall
be designed to operate at a negative pressure in relation to the surrounding
area.
(ii)
The system shall be equipped with monitoring equipment
to ensure that required exhaust flow or static pressure is
provided.
(iii)
Low-flow or static pressure conditions shall send an
alarm to the on-site emergency control station. The alarm shall be both visual
and audible.
(d)
Cabinet spill containment: Spill containment shall be
provided in each cabinet, with the spill containment capable of holding the
contents of the aggregate amount of liquids in containers in each
cabinet.
(e)
Valves: Valves in supply piping between the product
containers in the cabinet and the workstation served by the containers shall
fail in the closed position upon power failure, loss of exhaust ventilation and
upon actuation of the fire control system.
(f)
Fire detection
system: Each cabinet shall be equipped with an automatic fire detection system
complying with the following conditions:
(i)
Automatic
detection system: UV/IR, high-sensitivity smoke detection (HSSD) or other
approved detection systems shall be provided inside each
cabinet.
(ii)
Automatic shutoff: Activation of the detection system
shall automatically close the shutoff valves at the source on the liquid
supply.
(iii)
Alarms and signals: Activation of the detection system
shall initiate a local alarm within the fabrication area and transmit a signal
to the emergency control station. The alarms and signals shall be both visual
and audible.
(3)
2705.3
Transportation and handling. The transportation and handling of
hazardous materials shall comply with paragraphs
(E)(3)(a)(2705.3.1) to (E)(3)(d)(i)(2705.3.4.1) of
this rule and other applicable provisions of this code.
(a)
2705.3.1
Corridors and enclosures for stairways and ramps.
Corridors and enclosures for exit stairways and ramps
in new buildings or serving new fabrication areas shall not contain HPM except
as permitted for corridors by section 415.11.6.4 of the building code
as listed in rule
1301:7-7-80
of the Administrative Code and paragraph
(E)(3)(b)(2705.3.2) of this rule.
(b)
2705.3.2
Transport in corridors and enclosures for stairways and ramps.
Transport in corridors and enclosures for stairways and
ramps shall be in accordance with paragraphs
(E)(3)(b)(i)(2705.3.2.1) to (E)(3)(c)(2705.3.3) of
this rule.
(i)
2705.3.2.1 Fabrication area alterations.
Where existing fabrication areas are altered or modified in existing buildings,
HPM is allowed to be transported in existing corridors where such corridors
comply with paragraph (C)(10)( 5003.10) of rule
1301:7-7-50
of the Administrative Code and section 415.11.2 of the
building code as listed in rule
1301:7-7-80
of the Administrative Code.
(ii)
2705.3.2.2
HPM transport in corridors and enclosures for stairways and ramps.
Nonproduction HPM is allowed to be transported in corridors and enclosures for
stairways and ramps where utilized for maintenance, lab work and testing when
the transportation is in accordance with paragraph (C)(10)(
5003.10) of rule
1301:7-7-50
of the Administrative Code.
(c)
2705.3.3
Service corridors.
Where a new fabrication
area is constructed, a service corridor shall be provided where it is necessary
to transport HPM from a liquid storage room, HPM room, gas room or from the
outside of a building to the perimeter wall of a fabrication area. Service
corridors shall be designed and constructed in accordance with the
building code as listed in rule
1301:7-7-80
of the Administrative Code.
(d)
2705.3.4
Carts and trucks.
Carts and trucks used to
transport HPM in corridors and enclosures for stairways and ramps shall comply
with paragraph (C)(10)(c)(5003.10.3) of rule
1301:7-7-50
of the Administrative Code.
(i)
2705.3.4.1
Identification. Carts and trucks shall be marked to indicate the
contents.
Replaces: 1301:7-7-27
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