California Code of Regulations
Title 17 - Public Health
Division 3 - Air Resources
Chapter 1 - Air Resources Board
Subchapter 10 - Climate Change
Article 4 - Regulations to Achieve Greenhouse Gas Emission Reductions
Subarticle 3 - Regulation for Reducing Sulfur Hexafluoride Emissions
Section 95342 - Definitions

(1) "ARB" means the California Air Resources Board.

(2) "Arc Quenching Medium" means the use of a material to interrupt an electrical arc.

(3) "Cal/OSHA" means the California Department of Industrial Relations, Division of Occupational Safety and Health.

(4) "Chamber Cleaning" means the process of using fluorinated gases to remove excess materials from chemical vapor deposition chamber walls to prevent contamination of wafers to be processed.

(5) "Chemical Vapor Deposition (CVD)" means deposition of thin films on wafers by placing the wafers in a mixture of gases, including nitrogen or other gas used as a carrier, which react at the surface of the wafers.

(6) "Dielectric Medium" means the use of a material that does not conduct electricity but can sustain an electric field, with electrical conductivity of less than a millionth (10-6) of a siemens.

(7) "Distributor" means any person who sells or supplies sulfur hexafluoride in California, except that "distributor" does not include users who sell to a recycler or persons who return products to the seller.

(8) "Etching" means a chemical reactive process for selectively removing material on a wafer using fluorinated, ionized gases

(9) "Equipment Calibration" means the process of establishing the relationship between a measuring device and the units of measure. This is done by comparing a device or the output of an instrument to a standard having known measurement characteristics.

(10) "Executive Officer" means the Executive Officer of the California Air Resources Board, or his or her delegate.

(11) "Greenhouse gas" includes carbon dioxide (CO2), methane (CH4), nitrous oxide (N2O), sulfur hexafluoride (SF6), nitrogen trifluoride (NF3), hydrofluorocarbons (HFCs), and perfluorocarbons (PFCs).

(12) "Investment Casting" (also called "precision casting" or the "lost wax process") means the process of casting magnesium into a mold produced by surrounding, or investing, an expendable pattern with a refractory material.

(13) "Laboratory fume hood" means a boxlike structure enclosing a source of potential air contamination, with one open or partially open side, into which air is moved for the purpose of containing and exhausting air contaminants, generally used for bench-scale laboratory operations but not necessarily involving the use of a bench or table.

(14) "Military Applications" means the acquisition, research, development, testing, evaluation and training related to tactical vehicles, vessels, aircraft, equipment and weaponry owned or operated by the armed forces of the United States.

(15) "Military Tracer Gas Array" means the simultaneous use of multiple Tracer ES&T Model 2600 Tracer Gas Analyzers (TGA), to measure sulfur hexafluoride and other gases in support of military training and operations as well as United States military applications.

(16) "Person" shall have the same meaning as defined in Health and Safety Code section 39047.

(17) "Research" means an objective and systematic investigation aimed at the discovery and interpretation of scientific facts or revision of accepted scientific theories or laws in the light of new facts that cannot be answered a priori or by other methods.

(18) "Research Facility" means a physical location consisting of one or more buildings, such as a campus, which are all part of a single entity and whose primary purpose is to conduct research and/or provide education. The facility is under close supervision of technically trained personnel and is not engaged in the manufacture of products for sale in commerce or other off-site distribution. A research facility must be a U.S. government owned national laboratory or an accredited post-secondary institution that grants advanced academic degrees. Accreditation must be from a U.S. Department of Education approved accrediting agency.

(19) "Sand Casting" means the process of producing a part by forming a mold from a sand mixture and pouring molten magnesium into the cavity in the mold.

(20) "Tracer ES&T Model 2600 Tracer Gas Analyzers" means portable equipment designed, manufactured, and sold by Tracer Environmental Sciences & Technologies, Inc. (Tracer ES&T), a California Corporation, and designed specifically to analyze continuous samples of sulfur hexafluoride in the concentration range of 5 parts per trillion to 50 parts per billion.

(21) "Tracer Gas Testing" means the process of marking air or other media with a gas or other substance , which is released into an enclosure, laboratory fume hood, room, building, or environment to detect, measure, monitor, or evaluate flow rate, leakage, or dispersion or dilution characteristics.

(22) "User" means any person who uses sulfur hexafluoride.