Mandatory Reporting of Greenhouse Gases: Notice of Data Availability; Default Emission Factors for Semiconductor Manufacturing Refined Process Categories, 26904-26906 [2010-11430]

Download as PDF 26904 Federal Register / Vol. 75, No. 92 / Thursday, May 13, 2010 / Proposed Rules methods, under Executive Order 12898 (59 FR 7629, February 16, 1994). In addition, this rule does not have tribal implications, as specified by Executive Order 13175 (65 FR 67249, November 9, 2000), because the proposed rule merely makes a required determination based on air quality data and would neither impose substantial direct compliance costs on tribal governments, nor preempt tribal law, the requirements of sections 5(b) and 5(c) of the Executive Order do not apply to this rule. Consistent with EPA policy, EPA nonetheless provided a consultation opportunity to the Shoshone-Bannock Tribes in a letter to the Chairman of the Fort Hall Business Council, dated January 25, 2010, offering the Tribes the opportunity to consult on this determination and have meaningful and timely input into this proposed decision. In the spirit of Executive Order 13175, and consistent with EPA policy to promote communications between EPA and tribal governments, EPA specifically solicits additional comment on this proposed rule from tribal officials. List of Subjects in 40 CFR Part 81 Environmental protection, Air pollution control, Intergovernmental relations, Particulate matter, Reporting and recordkeeping requirements. Dated: May 3, 2010. Dennis J. McLerran, Regional Administrator, EPA Region 10. [FR Doc. 2010–11139 Filed 5–12–10; 8:45 am] BILLING CODE 6560–50–P ENVIRONMENTAL PROTECTION AGENCY 40 CFR Part 98 [EPA–HQ–OAR–2009–0927; FRL–9150–9] Mandatory Reporting of Greenhouse Gases: Notice of Data Availability; Default Emission Factors for Semiconductor Manufacturing Refined Process Categories cprice-sewell on DSKHWCL6B1PROD with PROPOSALS AGENCY: Environmental Protection Agency (EPA). ACTION: Data availability and request for comment. The Environmental Protection Agency (EPA) is making available to the public draft default emission factors for semiconductor manufacturing refined process categories. On April 12, 2010 EPA published a proposed rule, Mandatory Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs (75 FR 18652) which SUMMARY: VerDate Mar<15>2010 14:29 May 12, 2010 Jkt 220001 included proposed methods for monitoring and reporting greenhouse gases (GHGs) from electronics manufacturing. More specifically, as one option for monitoring and reporting, EPA proposed semiconductor manufacturers estimate emissions using default emission factors for nine distinct process categories. For each default emission factor, EPA proposed a range of values differentiated by production technology generation (i.e., wafer size). Based on additional information received since the publication of the proposed rule, EPA has developed draft emission factors for the proposed process categories. EPA is making those draft emission factors as well as the underlying data that was used to develop the draft emission factors available to the public for review and comment in the report, Draft Emission Factors for Refined Semiconductor Manufacturing Process Categories. DATES: Comments must be received on or before June 14, 2010. ADDRESSES: Submit your comments, identified by Docket ID No. EPA–HQ– OAR–2009–0927 by one of the following methods: • https://www.regulations.gov: Follow the on-line instructions for submitting comments. • E-mail: GHGReportingFGHG@epa.gov. • Fax: (202) 566–1741. • Mail: EPA Docket Center, Attention Docket OAR–2009–0927, Mail code 2822T, 1200 Pennsylvania Avenue, NW., Washington, DC 20460. • Hand/Courier Delivery: EPA Docket Center, Public Reading Room, Room 3334, EPA West Building, Attention Docket OAR–2009–0927, 1301 Constitution Avenue, NW., Washington, DC 20004. Such deliveries are only accepted during the Docket’s normal hours of operation, and special arrangements should be made for deliveries of boxed information. Instructions: Direct your comments to Docket ID No. EPA–HQ–OAR–2009– 0927. EPA’s policy is that all comments received will be included in the public docket without change and may be made available online at https:// www.regulations.gov, including any personal information provided, unless the comment includes information claimed to be Confidential Business Information (CBI) or other information whose disclosure is restricted by statute. Do not submit information that you consider to be CBI or otherwise protected through https:// www.regulations.gov. The https:// www.regulations.gov Web site is an ‘‘anonymous access’’ system, which PO 00000 Frm 00017 Fmt 4702 Sfmt 4702 means EPA will not know your identity or contact information unless you provide it in the body of your comment. If you send an e-mail comment directly to EPA without going through https:// www.regulations.gov your e-mail address will be automatically captured and included as part of the comment that is placed in the public docket and made available on the Internet. If you submit an electronic comment, EPA recommends that you include your name and other contact information in the body of your comment and with any disk or CD–ROM you submit. If EPA cannot read your comment due to technical difficulties and cannot contact you for clarification, EPA may not be able to consider your comment. Electronic files should avoid the use of special characters, any form of encryption, and be free of any defects or viruses. Docket: All documents in the docket are listed in the https:// www.regulations.gov index. Although listed in the index, some information is not publicly available, e.g., CBI or other information whose disclosure is restricted by statute. Certain other material, such as copyrighted material, will be publicly available only in hard copy. Publicly available docket materials are available either electronically in https:// www.regulations.gov or in hard copy at EPA’s Docket Center, Public Reading Room, EPA West Building, Room 3334, 1301 Constitution Ave., NW., Washington, DC 20004. This Docket Facility is open from 8:30 a.m. to 4:30 p.m., Monday through Friday, excluding legal holidays. The telephone number for the Public Reading Room is (202) 566–1744, and the telephone number for the Air Docket is (202) 566–1742. FOR FURTHER INFORMATION CONTACT: Kirsten Cappel, Climate Change Division, Office of Atmospheric Programs (MC–6207J), Environmental Protection Agency, 1200 Pennsylvania Ave., NW., Washington, DC 20460; telephone number: (202) 343–9556; fax number: (202) 343–2202; e-mail address: cappel.kirsten@epa.gov. SUPPLEMENTARY INFORMATION: Outline 1. What is today’s action? 2. What information is EPA making available for review and comment? 3. How does this information relate to the proposed rule Mandatory Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs? 4. Where can I get the information? 5. What is EPA taking comment on and what supporting documentation do I need to include in my comments? E:\FR\FM\13MYP1.SGM 13MYP1 Federal Register / Vol. 75, No. 92 / Thursday, May 13, 2010 / Proposed Rules 6. What should I consider as I prepare my comments for EPA? 7. Submitting Confidential Business Information (CBI) 1. What is today’s action? This notice of data availability (NODA) provides for public review and comment draft emission factors for the nine proposed refined semiconductor process categories differentiated by production technology generation (i.e., wafer size). The draft emission factors are being made available in Draft Emission Factors for Refined Semiconductor Manufacturing Process Categories. In Draft Emission Factors for Refined Semiconductor Manufacturing Process Categories EPA also presents detailed information on how the draft emission factors were developed and the underlying data used to develop the draft emission factors. cprice-sewell on DSKHWCL6B1PROD with PROPOSALS 2. What information is EPA making available for review and comment? EPA is making available for review and comment draft default emission factors for semiconductor manufacturing refined process categories in Draft Emission Factors for Refined Semiconductor Manufacturing Process Categories. EPA is also making available to the public the underlying emissions measurement data that were used to develop the draft emission factors. 3. How does this information relate to the proposed rule Mandatory Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs? On April 12, 2010 EPA published a proposed rule (Mandatory Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs (75 FR 18652)) revising and supplementing its initial proposed actions to require reporting of fluorinated greenhouse gas (fluorinated GHG) emissions from certain source categories.1 In that rule EPA proposed requirements for monitoring and reporting GHG emissions from electronics manufacturing, which includes facilities that manufacture semiconductors, photovoltaic cells (PV), micro-electro-mechanical systems (MEMS), and liquid crystal displays (LCDs). For semiconductor manufacturing, as one option, EPA proposed a method based on a refined set of process categories. More specifically, EPA proposed nine process categories differentiated by wafer diameter sizes of 150 mm, 200 mm and 1 EPA initially proposed monitoring and reporting methods for electronics manufacturing in Mandatory Reporting of Greenhouse Gases (74 FR 16448). VerDate Mar<15>2010 14:29 May 12, 2010 Jkt 220001 300 mm. For each of the nine proposed process categories, EPA proposed to establish default emission factors within a range of values. EPA used the term ‘‘NA’’ where currently available information did not exist to support a range. Within each process category, the emission factor ranges accounted for (1) the mass fraction of the input gas that is utilized during (i.e., not emitted from) the process and (2) the mass of each fluorinated GHG by-product formed as a fraction of the mass of the dominant fluorinated GHG input used. EPA proposed ranges because it had not yet received sufficient data to select a specific value within each range. In its proposal, EPA requested comment on the nine process categories that were proposed. In particular, EPA requested comment on whether the categories should be further refined to better capture the variability in emission rates among fluorinated GHG using manufacturing activities (e.g., whether any additional categories should be added or whether the proposed categories should be combined, and the definition of those categories). EPA also stated that if additional data were received in a timely fashion, EPA might develop draft emission factors for each category prior to the issuance of a final rule, differentiating among wafer sizes to the extent feasible. EPA noted that it would use a method of aggregation similar to the 2006 IPCC factor development methodology. EPA is making available, for public review and comment, draft emission factors for each of the nine proposed refined process categories in Draft Emission Factors for Refined Semiconductor Manufacturing Process Categories. It is important to note that in addition to an approach where EPA would publish draft emission factors for the nine proposed process categories, in its proposal, EPA stated that it is considering other approaches for monitoring and reporting emissions from semiconductor manufacturing. Please refer to the Electronics Manufacturing section of the notice titled Mandatory Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs (75 FR 18652) for a detailed discussion of the additional alternatives that EPA is considering for monitoring and reporting GHG emissions from semiconductor manufacturing. 4. Where can I get the information? All of the information can be obtained through the Air Docket and at https:// www.regulations.gov (see ADDRESSES section above for docket contact information). PO 00000 Frm 00018 Fmt 4702 Sfmt 4702 26905 5. What is EPA taking comment on and what supporting documentation do I need to include in my comments? EPA requests comment on topics including, but not limited to the following: • The representativeness and reliability of the draft emission factors for each process category based on measurements conducted. Where commenters provide data (i.e., emission measurement results), EPA encourages the submission of supporting information such as details of the method used to characterize process equipment emissions. • The validity of applying 200 mm processing technology emission factors to 150 mm processing technology emission factors, and potential alternatives for drawing analogies for 150 mm processing technology emission factors. Where commenters provide data (e.g., emission factors), EPA encourages the submission of supporting information such as details of the method used to characterize process equipment emissions. X Method used to form the draft emission factors, including EPA’s method for averaging the factors that account for gas utilization and byproduct formation for multi-gas chemistries. X The potential merits and disadvantages of consolidating emission factors by process category across all wafer technologies and how EPA could weight emission factors collected from various wafer technology equipment. X Number of significant figures to provide in emission factor tables for both gas utilization and by-product formation factors. X Alternatives to the analogies EPA used to assign gas utilization and byproduct formation factors when information for a gas or category is not currently available. X The merits and disadvantages of maintaining three wafer-technology categories compared to combining them into a single category. X The merits and disadvantages of reducing the number of etching categories from four to three (from oxide, nitride, silicon and metal etch to, for example, dielectric, silicon and metal etch categories), reducing the number of wafer cleaning categories from two to one, or reducing the number of categories for both etching and wafer cleaning. 6. What should I consider as I prepare my comments for EPA? You may find the following suggestions helpful for preparing your comments: E:\FR\FM\13MYP1.SGM 13MYP1 26906 Federal Register / Vol. 75, No. 92 / Thursday, May 13, 2010 / Proposed Rules 1. Explain your views as clearly as possible. 2. Describe any assumptions that you used. 3. Provide any technical information or data you used that support your views. 4. Provide specific examples to illustrate your concerns. 5. Offer alternatives. 6. Make sure to submit your comments by the comment period deadline identified. 7. To ensure proper receipt by EPA, identify the appropriate docket identification number in the subject line on the first page of your response. It would also be helpful if you provided the name, date, and Federal Register citation related to your comments. 7. Submitting Confidential Business Information (CBI) Do not submit information you are claiming as CBI to EPA through https:// www.regulations.gov or e-mail. Clearly mark the part of the information that you claim to be CBI. Information so marked will not be disclosed except in accordance with procedures set forth in 40 CFR part 2. For CBI information in a disk or CD ROM that you mail to EPA, mark the outside of the disk or CD ROM as CBI and then identify electronically within the disk or CD ROM the specific information that is claimed as CBI. In addition to one complete version of the comment that includes information claimed as CBI, a copy of the comment that does not contain the information claimed as CBI must be submitted for inclusion in the public docket. Dated: May 6, 2010. Brian J. McLean, Director, Office of Atmospheric Programs. [FR Doc. 2010–11430 Filed 5–12–10; 8:45 am] BILLING CODE 6560–50–P FEDERAL MARITIME COMMISSION 46 CFR Parts 520 and 532 [Docket No. 10–03] cprice-sewell on DSKHWCL6B1PROD with PROPOSALS NVOCC Negotiated Rate Arrangements; Notice of Public Meeting Federal Maritime Commission. Notice of public meeting. AGENCY: ACTION: SUMMARY: The Commission has determined to hold a public meeting on May 24, 2010 to receive oral comments concerning the Notice of Proposed Rulemaking published May 7, 2010 (75 FR 25150) regarding NVOCC Negotiated Rate Arrangements. VerDate Mar<15>2010 14:29 May 12, 2010 Jkt 220001 DATES: Requests to participate in the Public Meeting are due by May 14, 2010. By the Commission. Karen V. Gregory, Secretary. Address all requests to appear to: Karen V. Gregory, Secretary, Federal Maritime Commission, 800 North Capitol Street, NW., Room 1046, Washington, DC 20573–0001, (202) 523– 5725, E-mail: secretary@fmc.gov. [FR Doc. 2010–11425 Filed 5–12–10; 8:45 am] FOR FURTHER INFORMATION CONTACT: Karen V. Gregory, Secretary, Federal Maritime Commission, 800 North Capitol Street, NW., Room 1046, Washington, DC 20573–0001, (202) 523– 5725, E-mail: secretary@fmc.gov. 47 CFR Part 54 ADDRESSES: On April 29, 2010, the Federal Maritime Commission issued a Notice of Proposed Rulemaking (‘‘NPRM’’) proposing a new part 532, providing an exemption for non-vessel-operating common carriers (‘‘NVOCCs’’) agreeing to negotiated rate arrangements from certain provisions and requirements of the Shipping Act of 1984 and certain provisions and requirements of the Commission’s regulations. The NPRM also announced that the Commission would hold a public meeting if any member of the public made a request to make oral comments. Such a request has been received and the Commission has determined to convene this public meeting on May 24, 2010. The meeting will be held in the Commission’s Main Hearing Room, Room 100, 800 North Capitol Street, NW., Washington, DC. Requests to appear at the meeting must be filed with the Office of the Secretary no later than 5 p.m. on May 14, 2010, and include the name, street address, e-mail address, telephone number, and the name of your company or employer, if any. Parties wishing to participate should also provide a brief statement describing the nature of their business, e.g., Federal government agencies, OTIs, associations, consultants, tariff publisher and vesseloperating common carriers. Requests to appear should be addressed to the Office of the Secretary and submitted: By e-mail as an attachment (Microsoft Word) sent to secretary@fmc.gov; by facsimile to 202– 523–0014; or by U.S. mail or courier to Federal Maritime Commission, 800 North Capitol Street, NW., Washington, DC 20573. Please note, to avoid delay, e-mail or facsimile submissions are encouraged. The Commission will announce the time of the meeting, the order of presentation, and time allotment prior to the May 24, 2010 meeting. SUPPLEMENTARY INFORMATION: PO 00000 Frm 00019 Fmt 4702 Sfmt 4702 BILLING CODE 6730–01–P FEDERAL COMMUNICATIONS COMMISSION [WC Docket No. 10–90; GN Docket No. 09– 51, WC Docket No. 05–337; FCC 10–58] Connect America Fund, A National Broadband Plan for Our Future, HighCost Universal Service Support AGENCY: Federal Communications Commission. ACTION: Proposed rule. SUMMARY: The Federal Communications Commission (Commission) delivered to Congress a National Broadband Plan recommending that the Commission adopt cost-cutting measures for existing voice support and create a Connect America Fund, without increasing the overall size of the Fund, to support the provision of broadband communications in areas that would be unserved without such support or that depend on universal service support for the maintenance of existing broadband service. This document and the companion Notice of Inquiry is the first in a series of proceedings to implement that vision. This proceeding will develop the detailed analytic foundation necessary for the Commission to distribute funds in an efficient, targeted manner that avoids waste and minimizes burdens on American consumers. This document seeks comment on specific common-sense reforms to cap growth and cut inefficient funding in the legacy highcost support mechanisms and to shift the savings toward broadband communications. DATES: Comments on the proposed rules are due on or before July 12, 2010, and reply comments are due on or before August 11, 2010. ADDRESSES: You may submit comments, identified by WC Docket No. 10–90, GN Docket No. 09–51, WC Docket No. 05– 337, by any of the following methods: • Federal eRulemaking Portal: https:// www.regulations.gov. Follow the instructions for submitting comments. • Federal Communications Commission’s Web Site: https:// fjallfoss.fcc.gov/ecfs2/. Follow the instructions for submitting comments. • People with Disabilities: Contact the FCC to request reasonable E:\FR\FM\13MYP1.SGM 13MYP1

Agencies

[Federal Register Volume 75, Number 92 (Thursday, May 13, 2010)]
[Proposed Rules]
[Pages 26904-26906]
From the Federal Register Online via the Government Printing Office [www.gpo.gov]
[FR Doc No: 2010-11430]


-----------------------------------------------------------------------

ENVIRONMENTAL PROTECTION AGENCY

40 CFR Part 98

[EPA-HQ-OAR-2009-0927; FRL-9150-9]


Mandatory Reporting of Greenhouse Gases: Notice of Data 
Availability; Default Emission Factors for Semiconductor Manufacturing 
Refined Process Categories

AGENCY: Environmental Protection Agency (EPA).

ACTION: Data availability and request for comment.

-----------------------------------------------------------------------

SUMMARY: The Environmental Protection Agency (EPA) is making available 
to the public draft default emission factors for semiconductor 
manufacturing refined process categories. On April 12, 2010 EPA 
published a proposed rule, Mandatory Reporting of Greenhouse Gases: 
Additional Sources of Fluorinated GHGs (75 FR 18652) which included 
proposed methods for monitoring and reporting greenhouse gases (GHGs) 
from electronics manufacturing. More specifically, as one option for 
monitoring and reporting, EPA proposed semiconductor manufacturers 
estimate emissions using default emission factors for nine distinct 
process categories. For each default emission factor, EPA proposed a 
range of values differentiated by production technology generation 
(i.e., wafer size). Based on additional information received since the 
publication of the proposed rule, EPA has developed draft emission 
factors for the proposed process categories. EPA is making those draft 
emission factors as well as the underlying data that was used to 
develop the draft emission factors available to the public for review 
and comment in the report, Draft Emission Factors for Refined 
Semiconductor Manufacturing Process Categories.

DATES: Comments must be received on or before June 14, 2010.

ADDRESSES: Submit your comments, identified by Docket ID No. EPA-HQ-
OAR-2009-0927 by one of the following methods:
     https://www.regulations.gov: Follow the on-line 
instructions for submitting comments.
     E-mail: GHGReportingFGHG@epa.gov.
     Fax: (202) 566-1741.
     Mail: EPA Docket Center, Attention Docket OAR-2009-0927, 
Mail code 2822T, 1200 Pennsylvania Avenue, NW., Washington, DC 20460.
     Hand/Courier Delivery: EPA Docket Center, Public Reading 
Room, Room 3334, EPA West Building, Attention Docket OAR-2009-0927, 
1301 Constitution Avenue, NW., Washington, DC 20004. Such deliveries 
are only accepted during the Docket's normal hours of operation, and 
special arrangements should be made for deliveries of boxed 
information.
    Instructions: Direct your comments to Docket ID No. EPA-HQ-OAR-
2009-0927. EPA's policy is that all comments received will be included 
in the public docket without change and may be made available online at 
https://www.regulations.gov, including any personal information 
provided, unless the comment includes information claimed to be 
Confidential Business Information (CBI) or other information whose 
disclosure is restricted by statute. Do not submit information that you 
consider to be CBI or otherwise protected through https://www.regulations.gov. The https://www.regulations.gov Web site is an 
``anonymous access'' system, which means EPA will not know your 
identity or contact information unless you provide it in the body of 
your comment. If you send an e-mail comment directly to EPA without 
going through https://www.regulations.gov your e-mail address will be 
automatically captured and included as part of the comment that is 
placed in the public docket and made available on the Internet. If you 
submit an electronic comment, EPA recommends that you include your name 
and other contact information in the body of your comment and with any 
disk or CD-ROM you submit. If EPA cannot read your comment due to 
technical difficulties and cannot contact you for clarification, EPA 
may not be able to consider your comment. Electronic files should avoid 
the use of special characters, any form of encryption, and be free of 
any defects or viruses.
    Docket: All documents in the docket are listed in the https://www.regulations.gov index. Although listed in the index, some 
information is not publicly available, e.g., CBI or other information 
whose disclosure is restricted by statute. Certain other material, such 
as copyrighted material, will be publicly available only in hard copy. 
Publicly available docket materials are available either electronically 
in https://www.regulations.gov or in hard copy at EPA's Docket Center, 
Public Reading Room, EPA West Building, Room 3334, 1301 Constitution 
Ave., NW., Washington, DC 20004. This Docket Facility is open from 8:30 
a.m. to 4:30 p.m., Monday through Friday, excluding legal holidays. The 
telephone number for the Public Reading Room is (202) 566-1744, and the 
telephone number for the Air Docket is (202) 566-1742.

FOR FURTHER INFORMATION CONTACT: Kirsten Cappel, Climate Change 
Division, Office of Atmospheric Programs (MC-6207J), Environmental 
Protection Agency, 1200 Pennsylvania Ave., NW., Washington, DC 20460; 
telephone number: (202) 343-9556; fax number: (202) 343-2202; e-mail 
address: cappel.kirsten@epa.gov.

SUPPLEMENTARY INFORMATION: 

Outline

1. What is today's action?
2. What information is EPA making available for review and comment?
3. How does this information relate to the proposed rule Mandatory 
Reporting of Greenhouse Gases: Additional Sources of Fluorinated 
GHGs?
4. Where can I get the information?
5. What is EPA taking comment on and what supporting documentation 
do I need to include in my comments?

[[Page 26905]]

6. What should I consider as I prepare my comments for EPA?
7. Submitting Confidential Business Information (CBI)

1. What is today's action?

    This notice of data availability (NODA) provides for public review 
and comment draft emission factors for the nine proposed refined 
semiconductor process categories differentiated by production 
technology generation (i.e., wafer size). The draft emission factors 
are being made available in Draft Emission Factors for Refined 
Semiconductor Manufacturing Process Categories. In Draft Emission 
Factors for Refined Semiconductor Manufacturing Process Categories EPA 
also presents detailed information on how the draft emission factors 
were developed and the underlying data used to develop the draft 
emission factors.

2. What information is EPA making available for review and comment?

    EPA is making available for review and comment draft default 
emission factors for semiconductor manufacturing refined process 
categories in Draft Emission Factors for Refined Semiconductor 
Manufacturing Process Categories. EPA is also making available to the 
public the underlying emissions measurement data that were used to 
develop the draft emission factors.

3. How does this information relate to the proposed rule Mandatory 
Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs?

    On April 12, 2010 EPA published a proposed rule (Mandatory 
Reporting of Greenhouse Gases: Additional Sources of Fluorinated GHGs 
(75 FR 18652)) revising and supplementing its initial proposed actions 
to require reporting of fluorinated greenhouse gas (fluorinated GHG) 
emissions from certain source categories.\1\ In that rule EPA proposed 
requirements for monitoring and reporting GHG emissions from 
electronics manufacturing, which includes facilities that manufacture 
semiconductors, photovoltaic cells (PV), micro-electro-mechanical 
systems (MEMS), and liquid crystal displays (LCDs). For semiconductor 
manufacturing, as one option, EPA proposed a method based on a refined 
set of process categories. More specifically, EPA proposed nine process 
categories differentiated by wafer diameter sizes of 150 mm, 200 mm and 
300 mm. For each of the nine proposed process categories, EPA proposed 
to establish default emission factors within a range of values. EPA 
used the term ``NA'' where currently available information did not 
exist to support a range. Within each process category, the emission 
factor ranges accounted for (1) the mass fraction of the input gas that 
is utilized during (i.e., not emitted from) the process and (2) the 
mass of each fluorinated GHG by-product formed as a fraction of the 
mass of the dominant fluorinated GHG input used. EPA proposed ranges 
because it had not yet received sufficient data to select a specific 
value within each range.
---------------------------------------------------------------------------

    \1\ EPA initially proposed monitoring and reporting methods for 
electronics manufacturing in Mandatory Reporting of Greenhouse Gases 
(74 FR 16448).
---------------------------------------------------------------------------

    In its proposal, EPA requested comment on the nine process 
categories that were proposed. In particular, EPA requested comment on 
whether the categories should be further refined to better capture the 
variability in emission rates among fluorinated GHG using manufacturing 
activities (e.g., whether any additional categories should be added or 
whether the proposed categories should be combined, and the definition 
of those categories).
    EPA also stated that if additional data were received in a timely 
fashion, EPA might develop draft emission factors for each category 
prior to the issuance of a final rule, differentiating among wafer 
sizes to the extent feasible. EPA noted that it would use a method of 
aggregation similar to the 2006 IPCC factor development methodology. 
EPA is making available, for public review and comment, draft emission 
factors for each of the nine proposed refined process categories in 
Draft Emission Factors for Refined Semiconductor Manufacturing Process 
Categories.
    It is important to note that in addition to an approach where EPA 
would publish draft emission factors for the nine proposed process 
categories, in its proposal, EPA stated that it is considering other 
approaches for monitoring and reporting emissions from semiconductor 
manufacturing. Please refer to the Electronics Manufacturing section of 
the notice titled Mandatory Reporting of Greenhouse Gases: Additional 
Sources of Fluorinated GHGs (75 FR 18652) for a detailed discussion of 
the additional alternatives that EPA is considering for monitoring and 
reporting GHG emissions from semiconductor manufacturing.

4. Where can I get the information?

    All of the information can be obtained through the Air Docket and 
at https://www.regulations.gov (see ADDRESSES section above for docket 
contact information).

5. What is EPA taking comment on and what supporting documentation do I 
need to include in my comments?

    EPA requests comment on topics including, but not limited to the 
following:
     The representativeness and reliability of the draft 
emission factors for each process category based on measurements 
conducted. Where commenters provide data (i.e., emission measurement 
results), EPA encourages the submission of supporting information such 
as details of the method used to characterize process equipment 
emissions.
     The validity of applying 200 mm processing technology 
emission factors to 150 mm processing technology emission factors, and 
potential alternatives for drawing analogies for 150 mm processing 
technology emission factors. Where commenters provide data (e.g., 
emission factors), EPA encourages the submission of supporting 
information such as details of the method used to characterize process 
equipment emissions.
    X Method used to form the draft emission factors, including EPA's 
method for averaging the factors that account for gas utilization and 
by-product formation for multi-gas chemistries.
    X The potential merits and disadvantages of consolidating emission 
factors by process category across all wafer technologies and how EPA 
could weight emission factors collected from various wafer technology 
equipment.
    X Number of significant figures to provide in emission factor 
tables for both gas utilization and by-product formation factors.
    X Alternatives to the analogies EPA used to assign gas utilization 
and by-product formation factors when information for a gas or category 
is not currently available.
    X The merits and disadvantages of maintaining three wafer-
technology categories compared to combining them into a single 
category.
    X The merits and disadvantages of reducing the number of etching 
categories from four to three (from oxide, nitride, silicon and metal 
etch to, for example, dielectric, silicon and metal etch categories), 
reducing the number of wafer cleaning categories from two to one, or 
reducing the number of categories for both etching and wafer cleaning.

6. What should I consider as I prepare my comments for EPA?

    You may find the following suggestions helpful for preparing your 
comments:

[[Page 26906]]

    1. Explain your views as clearly as possible.
    2. Describe any assumptions that you used.
    3. Provide any technical information or data you used that support 
your views.
    4. Provide specific examples to illustrate your concerns.
    5. Offer alternatives.
    6. Make sure to submit your comments by the comment period deadline 
identified.
    7. To ensure proper receipt by EPA, identify the appropriate docket 
identification number in the subject line on the first page of your 
response. It would also be helpful if you provided the name, date, and 
Federal Register citation related to your comments.

7. Submitting Confidential Business Information (CBI)

    Do not submit information you are claiming as CBI to EPA through 
https://www.regulations.gov or e-mail. Clearly mark the part of the 
information that you claim to be CBI. Information so marked will not be 
disclosed except in accordance with procedures set forth in 40 CFR part 
2. For CBI information in a disk or CD ROM that you mail to EPA, mark 
the outside of the disk or CD ROM as CBI and then identify 
electronically within the disk or CD ROM the specific information that 
is claimed as CBI. In addition to one complete version of the comment 
that includes information claimed as CBI, a copy of the comment that 
does not contain the information claimed as CBI must be submitted for 
inclusion in the public docket.

    Dated: May 6, 2010.
Brian J. McLean,
Director, Office of Atmospheric Programs.
[FR Doc. 2010-11430 Filed 5-12-10; 8:45 am]
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